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Diaphragm pumps - the Ideal Backing Pumps for Pfeiffer Vacuum Turbopumps.

Dry and oil-free diaphragm pumps with a pumping speed of 6 to 160 l/min. They are ideally suitable for being used as a backing pump for Pfeiffer Vacuum turbopumps and for integration into compact systems.

Pfeiffer Vacuum leak detectors trace every leak.


Leak detectors: the answer to all your leaks, no matter how big or small
No leak is too small or too big to escape our leak detectors. It doesn’t matter whether you are looking for water, oil, fuel, refrigerant, gas, steam, air or vacuum leaks. From miniature electronic units right up to large-volume vessels, from media escaping from vacuum systems to gases entering them – the uses for leak detectors are as broad as the range of industrial products. The extensive range of Pfeiffer Vacuum leak detectors provides the answer for all these requirements.


The new mass spectrometer with the added plus


Compact design.

With the PrismaPlus, Pfeiffer Vacuum offers a new mass spectrometer for qualitative and quantitative gas analysis and leak detection. Pfeiffer Vacuum has earned a proven track record of customer and application-specific experience in the field of mass spectrometry over the last 40 years. The combination of high sensitivity, stability and intelligent operation is the added plus in the PrismaPlus mass spectrometer. In routine operation, the user benefits from its robust, compact design and simple systems integration.

A wide variety of application options.

With the ability to select mass ranges, detectors, ion sources and interface options, this mass spectrometer can be employed in many areas, such as : industrial and analytical environments, in research & development, in leak detection and semiconductor production, as well as in coating technology. The PrismaPlus is the optimum solution for applications ranging from quality assurance and residual gas analysis through to complex, quantitative tasks.


Qualitative and quantitative gas analysis

Mass spectrometry is an analytical method that is used for identifying chemical elements and compounds. With OmniStar and ThermoStar, Pfeiffer Vacuum offers two benchtop analysis systems for precise monitoring of process analysis for up to 128 different gases. OmniStar and ThermoStar are also suitable for reliably identifying unknown gases. Even low detection limits can be swiftly and easily determined for condensable gases.

The complete solution for high vacuum applications: The modular pumping station for clean vacuum.

With the modular design principle of the new HiCube series, the never-before-seen versatility will satisfy the widest range of requirements in the pumping speed range from 35 l/s to 685 l/s. Fully configured and ready for immediate employment, the turbopump and backing pump offer a perfect interplay: “Plug and Play” the way you want it.

The HiCube mobile turbopumping station sets new standards: It offers a convincing combination that consists of a new turbopump from the HiPace series and a backing pump designed for the user’s specific application needs. We offer you the new HiCube in Pro and Classic versions; available with dry or oil-sealed backing pump and an ultimate pressure of up to 5 • 10-10 mbar. Available as a version within the HiCube series that offers especially compact dimensions is the HiCube Eco with pumping speeds of 35 l/s to 67 l/s.

HiCube. Flexible. Compact. Versatile.
Proven Solutions for Roots Pumping Stations! More Advice. More Competence. More than just Vacuum.

E.g. in space simulation chambers, Roots pumping stations enable a vacuum similar to that encountered in space to be produced in these chambers in order to conduct preparatory tests for space missions
Roots pumps for Every Low and Medium Vacuum Applications. The Power Pump Portfolio.

Our Roots pumps offer pumping speeds ranging from 250 to 25,000 m3/h. They can be safely employed for low and medium vacuum applications in the coating or semiconductor industry, in research & development, metallurgy or in chemistry and process technology.

The gear and bearing chambers in our Roots pumps are completely separate from the gas pumping chamber. Because the rotors operate without making contact, dry, hydrocarbon-free operation is assured.

A further advantage: Thanks to air cooling, operating costs are significantly lower than with water cooling. The design principle of our proven Roots pumps has also been expanded to include magnetic couplings. These hermetically sealed pumps make oil leaks a thing of the past. We have also developed special pumps for processes that take place in explosive environments or for evacuating explosive gases.
A New Generation of Two-Stage Rotary Vane Pumps!

Pfeiffer Vacuum is committed to innovation. It was in this spirit that we developed the new PentaLine rotary vane pumps for your applications in the low- and medium-vacuum range of down to 10-3 mbar.

The optimized drive system that is used in these pumps affords you cost-effectiveness that is convincing and environmentally friendly. The approximate 50 % reduction in power consumption compared to ordinary rotary vane pumps makes for significantly lower operating costs.

Space-saving and hermetically sealed – the innovative PentaLine is super clean and requires only little maintenance. Both man and machine benefit equally from these New Generation rotary vane pumps. As a further innovation, they incorporate a motor concept that makes them easy to deploy anywhere in the world. The PentaLine pumps run extremely quiet and with a minimum of vibration.
A Complete Line of Single-Stage Rotary Vane Pumps for Low and Medium Vacuum Applications.

We now offer you a complete new line of new single-stage rotary vane pumps for all low and medium vacuum applications. These pumps offer pumping speeds of between 25 and 1,000 m3/h. Oil mist separator, oil return and safety valves are integrated as standard equipment in this line of pumps.

Their reliability, performance and compact size round out the outstanding features of the HenaLine pumps. Moreover, the principle of operation of the HenaLine pumps assures low operating temperatures.

The HenaLine innovation – Safe. Reliable. Powerful.
A Rugged Rotary Vane Pump. For Harshest Industrial Use.

The UnoLine Plus is an optimum solution for industrial applications. This rotary vane pump has a proven track record as both a stand-alone pump and as a backing pump for Pfeiffer Vacuum Roots pumps.

This is a water-cooled pump that is extremely resistant to dust and dirt. It is equipped with an oil regeneration system. This enables condensate, dirt and dust particles to be removed from the operating fluid, collected in the vapour separator and then drained. The adjustable cooling water regulating valve keeps the UnoLine Plus at the required operating temperature. The pumps are equipped with a gas ballast system for pumping off vapours.

The Workhorse for Industrial Vacuum Applications.
Oil Leaks are Now a Thing of the Past!

DuoLine rotary vane pumps cover all applications in the low and medium vacuum range of up to 10-3 mbar. These pumps offer reliable operation even for such critical industrial applications as drying processes, metallurgical processes or resin potting and casting systems – either as a standalone pump or as a backing pump in our CombiLine or turbopumping stations.

Thanks to their innovative drive concept, these pumps are hermetically sealed, making them clean and environmentally compatible. Because our magnetically coupled rotary vane pumps do not have radial shaft seals, there is no oil leak.

The use of a magnetic coupling minimizes maintenance requirements and leads to considerable cost savings per pump and maintenance interval.
Dry Screw Pumps. Optimum Ultimate Pressure. Absolutely Oil-Free. Cool-Running.

With HeptaDry, Pfeiffer Vacuum is once again providing the industry with another reliable, high-quality product. The pumps from this new series of dry screw pumps are optimally suited for their applications in connection with low and medium vacuum.

HeptaDry is a complete line of dry screw pumps. The line is designed for both industrial and coating applications. HeptaDry is the ideal solution for all areas in which oil-free vacuum is required. The pumping speeds that are offered by this series of products range from 100 to 600 m3/h. One special advantage consists of their single-piece, variable-pitch rotors. They assure the efficient internal compression to reduce energy cost requirements in the HeptaDry pumps. This enables thermally sensitive gases to be pumped as well. Moreover, the direct gas flow in the pump prevents deposits. High-quality axial face seals between the bearing and suction chamber make for increased reliability.

Can be used ideally either as stand-alone pumps or in combination with our OktaLine Roots pumps.
Compact, powerful high-vacuum pump against atmosphere with a pumping speed of 130 m3/h and an ultimate pressure of < 1·10-5 mbar:
HiPace stands for a complete line of compact yet powerful turbopumps featuring pumping speeds that range from 10 – 2,000 liters per second. These models afford cost-effective yet flexible installation in any orientation. The proven bearing system affords unrivaled dependability. And their sophisticated rotor design makes for higher pumping speeds, higher backing pump compatibility and higher gas throughputs, as well as very good compression for light gases.
Pfeiffer Vacuum as the inventor of the turbopump proves through the type series CompactTurbo its engineering leadership. The entire spectrum of widely differing applications can be covered reliably and in a cost-effective manner. The modular pump designs are available either by way of pure turbopumps or by way of turbopumps with integrated Holweck stages. Whereas classic turbopumps offer advantages in industrial applications involving particle loads and high gas loads, the advantage of the pumps equipped with Holweck stages is the higher start-up pressure with respect to the backing pump thereby reducing system costs and space requirements. In addition, turbopumps of a special design are available for applications involving corrosive gases.

The Pfeiffer Vacuum CompactTurbo series excels through its unique rotor design with a maintenance-free permanent magnetic bearing on the high vacuum side combined with ceramic ball bearings on the forevacuum side.

Total Pressure Measurement in a Vacuum With Analog Signal Output.

Total Pressure Measurement in a Vacuum With Digital Signal Output.