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Semicon SEA 2019
7 - 9 May 2019
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Nanoimprint Lithography Equipment

The Nano imPrinting Stepper NPS300 is a cutting-edge lithography solution that combines advantages of E-Beam-Resolution with high throughput and low cost of ownership.

The NPS 300 is a very flexible system available as a manually loaded machine or as a fully automated system. The automated stamp pick up, allows printing different pattern from different stamps on a wafer within a single cycle.
The NPS300 is optimized for the cost-effective replication of micro or nanometer scale structures.