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Mass Spectrometer RGA


Qualitative and quantitative gas analysis

Mass spectrometry is an analytical method that is used for identifying chemical elements and compounds. With OmniStar and ThermoStar, Pfeiffer Vacuum offers two benchtop analysis systems for precise monitoring of process analysis for up to 128 different gases. OmniStar and ThermoStar are also suitable for reliably identifying unknown gases. Even low detection limits can be swiftly and easily determined for condensable gases.


The new mass spectrometer with the added plus


Compact design.

With the PrismaPlus, Pfeiffer Vacuum offers a new mass spectrometer for qualitative and quantitative gas analysis and leak detection. Pfeiffer Vacuum has earned a proven track record of customer and application-specific experience in the field of mass spectrometry over the last 40 years. The combination of high sensitivity, stability and intelligent operation is the added plus in the PrismaPlus mass spectrometer. In routine operation, the user benefits from its robust, compact design and simple systems integration.

A wide variety of application options.

With the ability to select mass ranges, detectors, ion sources and interface options, this mass spectrometer can be employed in many areas, such as : industrial and analytical environments, in research & development, in leak detection and semiconductor production, as well as in coating technology. The PrismaPlus is the optimum solution for applications ranging from quality assurance and residual gas analysis through to complex, quantitative tasks.