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On Board Cryopumps & Waterpumps

The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
The Brooks CTI-Cryogenics On-Board Waterpumps are high-performance vacuum pumps that increase water vapor pumping speeds to substantially improve system throughput and provide better process results.  Available in several configurations and sizes to fit any application, these waterpumps provide the process flexibility, advanced productivity, and field-proven reliability today’s manufacturers expect and demand.